Assessing the potential of ion beam analytical techniques for depth profiling Li in thin film Li ion batteries

Depth resolution and probing depth for Li in lithium thin film batteries achievable using different ion beam analytical techniques were investigated. Experiments protons nuclear reaction analysis, He ions time-of-flight (TOF) energy elastic recoil detection analysis (ERDA) transmission geometry, as well coincidence ERDA geometry are performed. Experimental results compared terms of the obtained concentration separator layer. In experiments, significant loss Li–Li He–Li counts was observed due to multiple scattering recoiled/scattered particles battery sample. The ideal calculated techniques. A 750, 1030, 310, 510 × 1015 atoms/cm2 could be achieved Nb2O5 cathode by (NRA) 2 MeV H, TOF-ERDA 8 He, ions, respectively, upon optimization experimental setup. While a 120 ions/cm2 conventional an solid-state detector light primary such O under gracing incidence, experiments found produce significantly higher damage than other NRA performed this study is estimated order 10−4 dpa.